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Modeling and Deformation Analysis of Piezoresistive Cantilever for Bio-sensing Applications


  • National MEMS Design Centre, Department of EIE, L. B. Reddy College of Engineering (A), Mylavaram - 521 230 Andhra Pradesh, India
  • Department of Instrument Technology, College of Engineering, Andhra University,Visakhapatnam - 530003 Andhra Pradesh, India


Objectives: To design a simple piezoresistive cantilever punched with different shaped objects in the concept of Stress Concentrated Region (SCR) and study the effects of geometrical changes, addition of materials and applied loads to find out optimum conditions resulting high displacement sensitivity. Methods/Analysis: Design and simulation of piezoresistive cantilever with different punched objects (Circle, Triangle, Rectangle and T-Shape) to explore the maximum deformation. These design attempts indicate the bending of a cantilever under an applied load and solves the deformation of the beam under an applied force. The study also extended to analyze the sensitivity with the change of piezoresistive materials for same applied input force and given geometry. Findings: From the analyses of both the efforts, it is observed that the SiO2 based MEMS piezoresistive cantilever found to exhibit high deformation in turn sensitivity. The reasons for improvement in the sensitivity were discussed in detail by means of dimensional modifications, applied loads and materialistic properties. The design and simulations of a piezoresistive cantilever were carried out using commercial MEMS software tool COMSOL v 5.2a. Novelty/Improvement: This type of study would be useful to detect very minute biological mass changes that enable to overcome low resolution of the read out system for piezoresistive approach. The study of deformation of piezoresistive cantilever under surface stress loading may be treated as loading condition that take place in biochemical sensors.


Cantilever, Deformation, COMSOL V 5.2a, Piezoresistive.

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